Magnetostrictive Micro Mirrors for an Optical Switch Matrix
نویسندگان
چکیده
منابع مشابه
Magnetostrictive Micro Mirrors for an Optical Switch Matrix
We have developed a wireless-controlled compact optical switch by siliconmicromachining techniques with DC magnetron sputtering. For the optical switchingoperation, micro mirror is designed as cantilever shape size of 5mm×800μm×50μm.TbDyFe film is sputter-deposited on the upper side of the mirror with the condition as: Argas pressure below 1.2×10-9 torr, DC input power of 180W and heating tempe...
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ژورنال
عنوان ژورنال: Sensors
سال: 2007
ISSN: 1424-8220
DOI: 10.3390/s7102174